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Applications of Plasma Processes to VLSI Technology

Applications of Plasma Processes to VLSI Technology

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Applications of Plasma Processes to VLSI Technology

ISBN 9780471869603
Fiction/Non-Fiction Non-Fiction
Publisher John Wiley & Sons Inc
List Price $54.95
Author Sugano, Takuo
Publication Date 10/01/1985
Release Status In Print
Format Hardcover
Language English
Measurements Height: 9.5 Inches (US)
Width: 6.5 Inches (US)
Thickness: 1 Inches (US)
Unit Weight: 1.6 Pounds (US)
Editor Kim, Hyo-Gun
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